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Four Point Probe System -
The compact mapping system with a JANDEL probe head to measure SHEET RESISTANCE and RESISTIVITY of wafer up to 200 mm. The system offers perfect remote control by operating software under Windows OS, high measurement accuracy, predefined pattern points, ASTM and SEMI mode, X-Y-Z axis, 2D, 3D, data map analysis and trend chart function.
Other customized systems are available, such as FLAT PANEL(LCD, ITO, TFT)and thin film application. Under development are systems for inline production wafer testing featuring various options such as loading/unloading functions, SECSII interface.
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